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In this work, different effects of substrates on the morphologies of single-walled carbon nanotubes (SWNTs) are studied.SWNTs were produced by floating catalytic chemical vapor deposition using CH4 as carbon source gas and Ar as carrier gas.Then they were deposited on lithography-patterned different substrates (SiO2/Si, Cu, Au).The as-grown SWNTs at the boundaries between SiO2 and metal were characterized by scanning electron microscopy, atomic force microscopy and Raman spectroscopy.