Pull-in instability of a typical electrostatically actuated microresonator and its suppression by a

来源 :The 4th International Conference on Dynamics, Vibration and | 被引量 : 0次 | 上传用户:yangbintian
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A typical electrostatically actuated MEMS resonator is considered, and simplified as a softening-mass-damping vibrating system.Dynamical pull in and pull-in instability of the microstructure caused by DC bias voltage and AC voltage is discussed in detail.The delayed position feedback is induced to the system to improve pull-in stability.
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