Generation and application of plasma induced by pulsed power in supercritical fluid

来源 :2011年第三届微电子及等离子体技术国际会议 | 被引量 : 0次 | 上传用户:nn2268006
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We have studied generation of pulsed discharge plasma in subcritical or supercritical fluids,such as carbon dioxide,water,or argon.
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