Co-SiO2 membranes were fabricated and applied to PV dehydration of an ethanol/water and isopropyl alcohol (IPA)/water system.Preparation conditions such as the firing temperature, the firing atmosphere and the coating sols were investigated to tune membrane performance.The concentration-and temperature-dependence of ethanol feed solutions were evaluated to investigate the transport mechanism.Moreover, gas permeation rates for He, N2, CO2 and SF6 were measured and compared with those of ethanol and water during PV.