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Deposition Characteristics of Direct-Write Suspended Micro/Nano-Structures
【机 构】
：
Department of Mechanical and Electrical Engineering,Xiamen University,Xiamen,Fujian,CHINA
【出 处】
：
中国微米纳米技术学会第十届学术年会暨第一届国际会议(1st International Conference of th
【发表日期】
：
2008年期
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