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  5. Lateral growth of ZnO nanorod and its UV photoresponse

Lateral growth of ZnO nanorod and its UV photoresponse

来源 :2011年第三届微电子及等离子体技术国际会议 | 被引量 : 0次 | 上传用户：yanyongchao
【摘 要】
：
ZnO seed layer was deposited on glass by oblique angle sputtering method and Cr thin film as a metal barrier was patterned by lift-off technique.
【作 者】
：
M.-S. Kim D.-H. Lee B.-H. O S.-G. Lee E.-H. Lee S.-G. Park 
【机 构】
：
OPERA, Inha University, 253 Yonghyun-dong, Incheon, Republic of Korea
【出 处】
：
2011年第三届微电子及等离子体技术国际会议
【发表日期】
：
2011年9期
【关键词】
：
ZnO nanorod Lateral growth Photoresponse Hydrothermal 
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ZnO seed layer was deposited on glass by oblique angle sputtering method and Cr thin film as a metal barrier was patterned by lift-off technique.
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