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Diffusion couples,Fe-6.8 wt% Al-1.0 wt% Si/Fe and Fe-6.3 wt% Al-0.9 wt% Si/Fe were constructed and separately annealed at 1050℃ for 3 h and at 1000℃ for 64 h.The concentration profiles of Fe,Al and Si atoms in these couples were measured by electron probe micro-analysis (EPMA),while the diffusion behavior was also simulated by coupling thermodynamic and kinetic properties of Fe-Al-Si system.