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5. The Langmiur Probe and Optical Emission Spectroscopy Diagnostics of Dual-frequency Capacitively

The Langmiur Probe and Optical Emission Spectroscopy Diagnostics of Dual-frequency Capacitively

来源 :2011年第三届微电子及等离子体技术国际会议 | 被引量 : 0次 | 上传用户：aiqinghua5223

【摘 要】

：

Dual-frequency capacitively coupled plasmas (DF-CCPs) have attracted the attention of many authors in recent years.DF-CCPs are used to achieve independent control of ion flux and ion bombardment energ

【作 者】

：

Q. H. Yuan G. Q. Yin Y. Xin Z. Y. Ning 

【机 构】

：

Key Laboratory of Atomic and Molecular Physics & Functional Materials of Gansu Province, College of

【出 处】

：

2011年第三届微电子及等离子体技术国际会议

【发表日期】

：

2011年9期

【关键词】

：

Dual-frequency Capacitively Coupled Plasma Plasma Diagnostics Plasma Characteris 

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Dual-frequency capacitively coupled plasmas (DF-CCPs) have attracted the attention of many authors in recent years.DF-CCPs are used to achieve independent control of ion flux and ion bombardment energy onto the substrate.

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