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5. Measurement of electron density in fluoro-based capacitively coupled plasma by using floating resona

Measurement of electron density in fluoro-based capacitively coupled plasma by using floating resona

来源 :2011年第三届微电子及等离子体技术国际会议 | 被引量 : 0次 | 上传用户：fdiskhotmail

【摘 要】

：

Due to some challenges for the diagnosis of langmuir probe in reactive plasmas,microwave based probe techniques are now being better developed.

【作 者】

：

Yu Xin Shuai Zou Liangliang Ji Zhonghua Tang Xiaodong Su 

【机 构】

：

Provincial Key Lab of Thin Films, School of Physical Science and Technology, Soochow University, Chi

【出 处】

：

2011年第三届微电子及等离子体技术国际会议

【发表日期】

：

2011年9期

【关键词】

：

electronegative gas electron density capacitively coupled plasma floating resona 

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Due to some challenges for the diagnosis of langmuir probe in reactive plasmas,microwave based probe techniques are now being better developed.

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