【摘 要】
：
In this paper,six percent Nb-doped TiO2(NTO)thin filmns were prepared by High Target Utilisation Sputtering(HITUS)on glass substrates at different oxygen pressures at room temperature.After deposition
【机 构】
：
School of materials science and engineering,Zhengzhou University,Zhengzhou 450001;Henan Internationa
【出 处】
：
2015 Shanghai Thin Film Conference(2015上海薄膜国际会议)
论文部分内容阅读
In this paper,six percent Nb-doped TiO2(NTO)thin filmns were prepared by High Target Utilisation Sputtering(HITUS)on glass substrates at different oxygen pressures at room temperature.After deposition,the samples have been annealed at 500℃ for an hour on the hotplate in air.The structure,optical,electrical,and surface morphology characteristics of the NTO coatings have been analyzed as a function of the film thickness by X-ray diffraction(XRD),UV-Vis spectrophotometer,Hall effect measurements,and field emission scanning electron microscope(FESEM).In the sputtering deposition process the optical and electrical properties of films samples was significantly affected by the different flow rate of oxygen.As the oxygen flow increased,the visible light transmittance of films was significantly improved,but the conductive properties of the film were significantly reduced.The best characteristics have been obtained after optimization of the parameters.The NTO films exhibited that the resistivity(9.4×10-4Ωcm)was minimum while the Hall mobility(3.43cm2V-1-1)and carrier density(3.63× 1021cm-3)were maximum after heating the film at 500℃ when the oxygen flow rate was 6.4sccm,the optical transmittance in the visible light range of the film was about 80-90%.
其他文献
Hydroxyapatite nano-rods/fibers patterned oxides-based coatings were fabricated on titanium,zirconium,tantalum and magnesium,respectively,using a hybrid approach of microarc oxidation and hydrothermal
Although titanium(Ti)based medical devices have been used clinically for more than 30 years,there are still weaknesses for them that need to be resolved.The lacks of osteoconduction and osteointegrati
Superhydrophilic surface was achieved by plasma oxidation on SLA surface in the paper,which is deemed to highly enhance osseointegration between dental implant and bone.Titanium oxide surface was achi
Titanium-based alloys are commonly used in orthopedic implants because of their desirable mechanical strength,corrosion resistance,and biocompatibility.Bacterial infection often induces the implant fa
The control over cell adhesion on bone implants is of crucial importance for the optimal osteointegration.In this study,we demonstrate the first time use of a mussel-inspired polymer,polydopamine(PDA)
Amorphous metal oxides semiconductors,particularly InGaZnO(IGZO),have attracted great attention due to their superior properties,such as high electron mobility(> 10 em2/Vs),excellent optical transpare
The conventional von-Neumann architecture,which physically separates processing and memory operations,is limited so much as the processor cannot execute a program faster than instructions and data can
Owing to its higher electron and hole mobilities compared to Si,Germanium(Ge)is considered as one of the promising materials in future microelectronic devices.To meet the request of high performance d
Strain technology is commonly considered as an effective means for enhancing MOSFET performance.The mechanical stress induced by wafer bending method is widely used for understanding the physical mech
Integration of Ⅲ-Ⅴ materials on germanium(Ge)substrate,which has been investigated for decades,provides an effective mediation approach for silicon based optoelectronic devices.[1] GaAsBi,as a relativ