To remove the dust particles about 100 cm long within the vacuum chamber,we have developed a large rectangular plasma device with size of 120(L) x 50(W) x 44(H) cm^3.
Dynamic processes of capacitively-coupled hydrogen plasmas generated by fast-rising pulsed high voltages at near-atmospheric pressure have been studied with the use of Particle-in-Cell (PIC) simulatio
Wave-cutoff method is an electron density measurement tool.In this method,an electron density can be acquired from the transmission spectra analysis of plasma.
When a laser is tuned between two excited energy levels of a gas in a DC discharge lamp,the discharge current will experience a temporary disturbance lasting tens or hundreds of microseconds known as
Metal plasma is composed of metal ions produced by diffuse arc.The metal ions possess some special properties such as orientational movement and so on.
Inductively coupled plasmas (ICPs) produced in SF6 and its mixtures with other gases (Ar,O2,CF4,SiCl4,…) have been widely used for Si etching in a variety of applications,especially for deep trench et
Transformer Coupled Plasma(TCP) is different from well known Inductively Coupled Plasma(ICP),because the former has a magnetic core between the primary coil and the secondary coil.
With a two-dimensional fluid model,we simulate the discharge characteristics of pulse-modulated radio-frequency dielectric barrier discharge in atmospheric helium.