A Piezo-actuated Compliant 3-DoF Nano-tooling for Micro/nanomachining - 论文文献免费下载 - 搜论网

A Piezo-actuated Compliant 3-DoF Nano-tooling for Micro/nanomachining

来源 :第6届纳米操纵、制造与测量国际会议( the International Conference IEEE 3M-NANO | 被引量 : 0次 | 上传用户：cw545400

【作者】

：

Zhiwei Zhu Sandy To

【机构】

：

State Key Laboratory of Ultra-precision Machining Technology,Department of Industrial and Systems En

【出处】

：

第6届纳米操纵、制造与测量国际会议( the International Conference IEEE 3M-NANO

【发表日期】

：

2016年5期

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