论文部分内容阅读
本文叙述了一米长光栅刻划机中激光干涉仪双光楔条纹调节机构、便携式单频激光干涉仪中弹性浮动条纹调节机构和几种光栅莫尔条纹调节机构的设计原理和使用情况,这些机构的应用,对单频激光干涉仪和光栅传感器的研制有较大的作用。
This paper describes the design principle and usage of the double-wedge stripe adjustment mechanism of a laser interferometer in a one-meter long grating sclering machine, the flexible floating stripe adjustment mechanism in the portable single-frequency laser interferometer, and several grating moire fringes adjusting mechanisms Institutional applications, the single-frequency laser interferometer and grating sensor has a greater role in the development.