Recent development of moirtechniques for micronnano-scale structure characterization

来源 :2014年光子与光学工程国际会议暨西部光子学学术会议 | 被引量 : 0次 | 上传用户:a294953312
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  Periodic structures at the micron and the nano-scales are ubiquitous in numerous natural and artificial materials and constructions.The structural characterization is vitally important for understanding their excellent properties and evaluating the structural stabilities.Aiming at characterization of various periodic structures in different arrangements,we developed several moire techniques for non-destructive quantitative evaluation of micron/nano-structures.The sizes and orientations of structures arranged in one or two or three directions can be determined in a large view field.For those structures whose sizes and orientations slightly or dramatically vary in different domains,the structural parameters in different domains as well as the domain boundaries can be simultaneously detected.Some typical applications in the structural analyses of nanoparticles,nanopores,butterfly wings and hexagonal meshes were presented.The developed moire techniques are expected to find more extensive applications in the fields of bionics and structural material sciences.
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