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In this paper, the mixture of TiO2/graphene thin film with MSM (metal-semiconductor-metal) structure was used to fabricate ultraviolet (UV) detector.Titania was fabricated via sol-gel method and graphene was fabricated by graphite oxide reduction method, then the mixture was spin coated on silicon wafer with 300nm oxide layer and annealed at four different temperature (400℃, 500℃,600℃ and 800℃).