【摘 要】
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The TiN/TiAlN nano-multilayer coatings with different modulation period were deposited successfully on m2 high speed steel by a pulsed bias arc ion plating system.The effect of modulation period on th
【出 处】
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第十一届全国表面工程大会暨第八届全国青年表面工程学术会议
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The TiN/TiAlN nano-multilayer coatings with different modulation period were deposited successfully on m2 high speed steel by a pulsed bias arc ion plating system.The effect of modulation period on the microstructure and mechanical properties was investigated.With the increasing of deposition period,the Al contents in TiN/TiAln multilayer coatings monotonically increased continuously a little from 0.135 to 0.142,whereas the Ti and N contents were nearly constant.The microstructure TiN/TiAln multilayer coatings were crystallized with preferred orientation in(111)crystallographic planes.At modulation period of 164nm,the nanohardness reached a maximum of 38.9 GPa.The Youngs modulus values were in the range of 418-591 GPa.The adhesion strength reached a maximum of 66.2 N at modulation period of 54 nm.
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