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The commonly used liquid electrolyte in lithium-ion batteries remains to be a serious safety issue.The development of novel solid electrolyte becomes an effective way to solve this problem.This work focuses on the fabrication of new solid state electrolyte of Li3OCl thin film by sol-gel method using lithium chloride (LiCl) and lithium t-butoxide (LTB) as precursors and tetrahydrofuran as solvent.The effect of various LTB/LiCl ratios, annealing temperature and atmosphere on the structure, composition and morphology of Li3OCl films has been investigated deeply by means of X-ray diffraction, X-ray photoelectron spectroscopy, and scanning electron microscopy.The results show that sol-gel-derived Li3OCl films have relatively uniform and dense morphology with single layer thickness of about 760 un.The annealing temperature has larger influence on the composition and phase.The lithium ion conductivity of Li3OCl films has been evaluated by electrochemical impedance spectroscopy.The cycle stability of the asymmetric ceils made of Cu and Li electrodes by coating Li3OCl layers has be improved significantly.