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  5. Deposition of Nb-Zr-Ta-Ti-W Multicomponent Alloy Thin Films by Unbalance Magnetron Sputtering

Deposition of Nb-Zr-Ta-Ti-W Multicomponent Alloy Thin Films by Unbalance Magnetron Sputtering

来源 :The 8th Asian-European International Conference on Plasma Su | 被引量 : 0次 | 上传用户：hefei666_y
【作 者】
：
Xingguo Feng Mingren Sun Gnangze Tang Xinxin Ma 
【机 构】
：
School of Materials Science and Engineering,Harbin Institute of Technology,Harbin 150001,China
【出 处】
：
The 8th Asian-European International Conference on Plasma Su
【发表日期】
：
2011年1期
【关键词】
：
Multicomponent alloy Unbalance magnetron sputtering Composition structure Hardne 
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