Fabrication of titanium oxide nanodot ultraviolet light sensor by atomic force microscopy nanolithog

来源 :International Conference on Nanoscience & Technology,China 2 | 被引量 : 0次 | 上传用户：ylmny

【摘要】

：

We report on a method for the fabrication of an ultraviolet (UV) light nanosensor by atomic force microscopy (AFM) nanolithography.The nanosensor is based on a single titanium oxide nanodot (ND) in a

【作者】

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Li-Yang Hong Heh-Nan Lin

【机构】

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Department of Materials Science and Engineering,National Tsing Hua University,Hsinchu 30013,Taiwan,C

【出处】

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International Conference on Nanoscience & Technology,China 2

【发表日期】

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2013年3期

【关键词】

：

TiO2 Nanowire Nanosensor AFM

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　　We report on a method for the fabrication of an ultraviolet (UV) light nanosensor by atomic force microscopy (AFM) nanolithography.The nanosensor is based on a single titanium oxide nanodot (ND) in a single titanium nanowire (NW).The detection mechanism is due to the desorption of oxygen molecules on the ND surface upon UV irradiation.Consequently, the current passing through the ND increases and can be utilized for detection.

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Fabrication of titanium oxide nanodot ultraviolet light sensor by atomic force microscopy nanolithog

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