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5. New Natively Textured Surface Al-doped ZnO-TCOs for Si-based Thin Film solar cells via magnetron spu

New Natively Textured Surface Al-doped ZnO-TCOs for Si-based Thin Film solar cells via magnetron spu

来源 :2011年第三届微电子及等离子体技术国际会议 | 被引量 : 0次 | 上传用户：aylwq

【摘 要】

：

Natively textured surface aluminum doped zinc oxide (ZnO∶Al,AZO) thin films were directly deposited via pulsed direct current (DC) magnetron reactive sputtering on glass substrates.

【作 者】

：

Xin-liang Chen Fei Wang 

【机 构】

：

Institute of Photo-electronic Thin Film Devices and Technology & Tianjin Key laboratory of Photo-ele

【出 处】

：

2011年第三届微电子及等离子体技术国际会议

【发表日期】

：

2011年9期

【关键词】

：

zinc oxide thin films magnetron sputtering naturally textured surface solar cell 

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Natively textured surface aluminum doped zinc oxide (ZnO∶Al,AZO) thin films were directly deposited via pulsed direct current (DC) magnetron reactive sputtering on glass substrates.

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