Investigation of diamond film synthesized by chemical vapor deposition (CVD) has still attracted much attention for its outstanding properties.It would be firstly proposed to deposit spherical diamond films by DC-Plasma CVD on spherical molybdenum substrate.SEM,AFM,Raman,XRD were used to observe internal fiber texture,film quality,surface phase,respectively.Results show that the crystal grain is compact,clear,continuous and uniform.There is clear evidence of the columnar growth from the substrate surface to the diamond film surface.The diamond (111),(220),(311) peaks were clearly observed and no graphite peak was detected,which exhibited the film was an obviously polycrystalline texture.The typical Raman spectrum of diamond was found at 1332.0 cm-1 without observing characteristic peaks of polycrystalline graphite and amorphous graphite.Thus,high quality Spherical diamond films were deposited successfully.Results also indicated that grain size increases with increasing of the CH4 concentration.The evolution of the columnar growth causes enlarging the grain,which affects diamond quality.Based on the experimental observations,the low CH4 concentration was benefit of growing high quality spherical films.