【摘 要】
：
In recent years,large area discharge has attracted many attentions due to its potential applications in plasma biomedicine technology,plasma invisibility,plasma flow control.However,the generation and
【机 构】
：
School of Physics and Optoelectronic Engineering, Key Laboratory of Materials Modification by Laser,
【出 处】
：
13th Asia-Pacific Conference on Plasma Science and Technolog
论文部分内容阅读
In recent years,large area discharge has attracted many attentions due to its potential applications in plasma biomedicine technology,plasma invisibility,plasma flow control.However,the generation and maintaining of stable and uniform large area discharge plasma is quite challenging,especially with air as the work gas.In present work,a dielectric barrier discharge (DBD) plasma apparatus with special mesh electrode configuration was studied at low pressure less than 5 torr to investigate the features of large area DBD plasma,duo to some unique technical advantages of this type of discharge,such as low gas temperature,good stability,advanced plasma chemistry and etc.The distance of 7 mm between two electrodes (320*220 mm) was chosen and air was used as working gas.
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