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半浮栅晶体管(SFGT)同时具有操作速度快和存储密度高两个特点,而且它的制造工艺和电可擦除只读存储器(EEPROM)高度兼容.本文对半浮栅晶体管注入剂量、抗干扰特性和操作电压等进行了相关的研究.
半浮栅晶体管性能研究
【摘 要】
：
半浮栅晶体管(SFGT)同时具有操作速度快和存储密度高两个特点,而且它的制造工艺和电可擦除只读存储器(EEPROM)高度兼容.本文对半浮栅晶体管注入剂量、抗干扰特性和操作电压等
【机 构】
：
微电子学院,复旦大学,上海200433
【出 处】
：
2016年上海市研究生学术论坛——电子科学与技术
【发表日期】
：
2016年期
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