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5. The Infulence of High-temperature Annealing on Hardness,Stress,and Oxidation Resistance of TiAlN/Al2

The Infulence of High-temperature Annealing on Hardness,Stress,and Oxidation Resistance of TiAlN/Al2

来源 :The 11th International Workshop on Plasma-Based Ion Implanta | 被引量 : 0次 | 上传用户：a490093469

【作 者】

：

J.Y.Yah L.Dong D.J.Li S.Zhang M.Cao 

【机 构】

：

College of Physics and Electronic Information Science, Tianjin Normal University, Tianjin, China

【出 处】

：

The 11th International Workshop on Plasma-Based Ion Implanta

【发表日期】

：

2011年3期

【关键词】

：

magnetron sputtering TiAlN/Al2O3 multilayer oxidation resistance high temperatur 

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