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根据三角形放大原理设计出一种以压电陶瓷为驱动元件、应变片为微位移传感元件的精密微位移机构，由于压电陶瓷存在迟滞、蠕变和非线性的不足，并且难于得到其准确的数学模型，采用常现线性PID控制方法很难实现微驱动机构的高速高精度控制，针对这一问题，将基于数字PI控制的仿人智能控制方法应用于微驱动系统的控制中，它是在数字PID控制算法的基础上通过仿人智能控制的特征变量en·Δen的取值符号选择相应的控制策略，实验结果表明采用该方法可以大大地提高系统的静态和动态性能．
According to the principle of triangular amplification, a precise micro-displacement mechanism based on piezoelectric ceramic as drive element and strain gauge as micro-displacement sensor is designed. Due to the hysteresis, creep and nonlinearity of piezoelectric ceramic, it is difficult to obtain the accurate It is difficult to realize high-speed and high-precision control of micro-drive mechanism by using the conventional linear PID control method. In view of this problem, an artificial intelligence control method based on digital PI control is applied to the control of micro-drive system. It is Based on the digital PID control algorithm, the corresponding control strategy is selected by the sign of en · Δen, which is controlled by artificial intelligence. Experimental results show that this method can greatly improve the static and dynamic performance of the system.