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通过对立式多箱体连续磁控溅射镀膜生产线的工艺方法和工艺装备的改进,改善现有OGS用ITO低温镀膜技术的各项缺陷,并使手机盖板ITO一次成膜工艺得以确定。研究表明:一次成膜工艺制品的热稳定性优良,在200℃下烘烤20min其方块电阻变化△R<4%;透过率均可达到91%左右,色差值△E<1.1,雾度值亦满足要求;一次成膜的生产工艺合格率达到了92~96%以上,可达量产要求。
Through the improvement of the technological process and equipment of continuous multi-box continuous magnetron sputtering coating production line, the defects of the existing OGS low-temperature coating technology are improved, and the one-time film-forming process of the mobile phone cover ITO is determined. The results showed that the thermal stability of a film-forming process was excellent. The sheet resistance change △ R <4% at 200 ℃ for 20 min, the transmittance of 91%, the color difference △ E <1.1, the fog The value also meet the requirements; a film of the production process pass rate reached 92 to 96% or more, up to mass production requirements.