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为解决ZrCl4蒸汽法化学气相沉积包覆燃料颗粒ZrC涂层时锆源输送的控制问题,设计制造了锆源输送装置。改装坩埚电阻炉,配备温度控制箱,以满足蒸发器的连接和控温要求;设计不锈钢蒸发器与耐高温、腐蚀压力表以满足腐蚀性气体测压要求;使用加热带和玻璃纤维布以满足ZrCl4蒸汽输送过程保温要求。最后进行ZrCl4蒸汽载带实验。实验结果表明,通过控制蒸发器加热温度和载气流量该装置可以实现ZrCl4蒸汽的定量载带,为ZrCl4蒸汽法沉积ZrC涂层提供了设备基础。
In order to solve the control problem of zirconium source transport in ZrCl4 vapor deposition coating with ZrC coating, a zirconium source transport device was designed and manufactured. Retrofit crucible resistance furnace equipped with temperature control box to meet the requirements of the evaporator connection and temperature control; design of stainless steel evaporator and high temperature, corrosion pressure gauge to meet the corrosive gas manometry requirements; the use of heating and fiberglass cloth to meet ZrCl4 vapor transport process insulation requirements. The final ZrCl4 steam carrier experiments. The experimental results show that the device can realize the quantitative carrier of ZrCl4 vapor by controlling the heating temperature of the evaporator and the carrier gas flow rate, which provides the equipment basis for ZrC4 vapor deposition ZrC coating.