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应用干涉法测非球面,必须测量参考球面的曲率半径才能得到非球面的面形,因此需要精密的测长机构.本文介绍一种在一维测量时,用数学方法确定非球面最佳参考圆的参数,进而由干涉图求得非球面面形或面形误差的新方法,从而可省去测长机构.所提出的微扰动阻尼牛顿迭代法求非线性最小二乘解,经实践证明,有很好的迭代效果.
The application of interferometry to measure aspheric surface, the radius of curvature of the reference sphere must be measured to obtain the aspherical surface shape, so the precise length measuring mechanism is required.This paper introduces a method to determine the best aspheric reference circle , And then the new method of obtaining the aspherical surface or surface shape error from the interferogram can eliminate the need of the length measuring mechanism.The proposed Newton iteration method with the perturbation damping method solves the nonlinear least squares solution, Have a good iterative effect.