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以RuCl3·3H2O水溶液为电沉积液,采用直流-示差脉冲组合电沉积技术,通过后续热处理工艺制备超级电容器用钽基RuO2·nH2O薄膜电极材料。用X射线衍射仪(XRD)、红外光谱仪(FTIR)、差热分析仪(DTA)、扫描电镜(SEM)和电化学分析仪,研究前驱体RuCl3·cH2O转化为RuO2·nH2O的物相演变行为以及微观组织形貌和循环伏安性能。结果表明:随着热处理温度升高,前驱体RuCl3·cH2O通过4步反应转变成RuO2·nH2O薄膜;该薄膜经历从无定形向晶体结构的转变。经300℃热处理的RuO2·nH2O薄膜电极材料的单位面积质量为2.5mg/cm2,比电容达到512F/g;当电压扫描速率从5mV/s增加到250mV/s时,其比电容下降34%。
RuCl 3 · 3H 2 O aqueous solution was used as electrodeposition solution and DC-differential pulse combined electrodeposition technique was used to prepare tantalum-based RuO2 · nH2O thin film electrode material for supercapacitor through subsequent heat treatment. The phase transformation of RuCl3 · cH2O precursor into RuO2 · nH2O was studied by XRD, FTIR, DTA, SEM and electrochemical analyzer. As well as microstructure and cyclic voltammetry. The results show that the RuCl3 · cH2O precursor is transformed into RuO2 · nH2O film by 4 steps reaction with the increase of heat treatment temperature. The film undergoes the transition from amorphous to crystalline structure. The mass per unit area of the RuO2 · nH2O thin film electrode material after heat treatment at 300 ℃ is 2.5mg / cm2, and the specific capacitance reaches 512F / g. The specific capacitance decreases by 34% when the voltage scanning rate increases from 5mV / s to 250mV / s.