分析了大规模半导体器件生产厂房通风空调系统的特点 ,并以某工程为例 ,说明该类厂房能耗大的现状 ,从设计计算和运行管理的角度分析了造成这一不合理现状的原因 ,指出该类厂房应采用变频技术 ,按照生产和非生产工况 ,对送风量、排风量和新风量进行调节、控制 ,达到节能的目的。 This paper analyzes the characteristics of ventilation and air conditioning system in a large scale semiconductor plant, and takes a project as an example to illustrate the current situation of energy consumption in this type of plant. From the perspective of design calculation and operation management, this paper analyzes the causes of this unreasonable situation, It is pointed out that this type of plant should adopt frequency conversion technology to adjust and control the amount of air supply, exhaust volume and fresh air volume in accordance with the production and non-production conditions so as to save energy.