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光学法测量表面质量—缺陷及光洁度等自激光出现以来得以迅速发展;而新型的光纤传感器研制成功更丰富了表面质量测量的内容。国内对于0.60≤R≤0.90mm内外小球面光洁度检测,以及环类、筒型零件内圆柱表面缺陷的检验一直是个难题。而且,这类零件的检查在机械行业中带有普遍的意义。我们成功地把激光、光纤及微电子等新技术用于上述零件的表面质量检查中,较好地解决了所述类型零件测量上的问题。
Optical method to measure the surface quality - defects and smoothness since the emergence of the laser has been rapid development; the successful development of a new type of optical fiber sensor enriched the content of the surface quality measurement. For the domestic 0.60 ≤ R ≤ 0.90mm spherical surface smoothness testing, as well as the ring, cylinder parts cylindrical surface defects inspection has been a problem. Moreover, the inspection of such parts has a universal meaning in the machinery industry. We have successfully applied new technologies such as laser, optical fiber and microelectronics to the surface quality inspection of the above parts, and solved the problems in the measurement of these types of parts.