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为了解工艺对多层涂层性能的影响,针对偏置电压对涂层中残余应力以及其相应摩擦性能的影响进行了研究,并通过更改工艺参数来制备优良的涂层系统并调整其残余应力。通过磁控溅射装置利用-75～-150V的偏置电压把Cr/CrAlN多层涂层系统沉积到热作模具钢H11上。除对涂层进行了金像分析外,还使用X射线衍射来分析了其残余应力。通过扫描电子显微镜测定涂层的结构和形态,采用纳米压痕实验和球盘摩擦实验来验证来工艺参数对力学和摩擦性能的影响。结果表明,残余应力随着偏置电压的增加而增长,并导致了更致密和更无序的微观结构。由于涂层的致密,涂层的硬度和涂层的杨氏模量也急剧增加。摩擦学性能也随着偏置电压的增高进一步受到涂层表面形态以及高残余应力和高硬度组合的综合影响。
In order to understand the influence of process on the performance of multi-layer coating, the influence of bias voltage on the residual stress in the coating and its corresponding tribological properties were studied, and the excellent coating system was prepared and the residual stress was adjusted by changing the process parameters . The Cr / CrAlN multi-layer coating system was deposited on hot die steel H11 by magnetron sputtering using a bias voltage of -75 to -150V. In addition to the image analysis of the coating, X-ray diffraction was also used to analyze the residual stress. The structure and morphology of the coating were determined by scanning electron microscopy. The effects of process parameters on the mechanical and tribological properties were verified by nano-indentation experiments and ball-disk friction experiments. The results show that the residual stress increases with the bias voltage and leads to a denser and more disordered microstructure. Due to the compactness of the coating, the hardness of the coating and the Young’s modulus of the coating also increase sharply. Tribological properties are further affected by the combination of the surface morphology of the coating and the combination of high residual stress and high hardness as the bias voltage increases.