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本文论述了新兴纳米加工技术－ＳＴＭ（ＳｃａｎｎｉｎｇＴｕｎｎｅｌｉｎｇＭｉｃｒｏｓｃｏｐｅ）的原理、实验方法、结构形成的机理和最新成果，并分析了它的发展潜力和当前需要研究的主要课题。
This paper discusses the principle, experimental method, mechanism and latest achievements of the emerging nanotechnology-STM (Scanning Processing Microscope), and analyzes its development potential and the main topics to be studied currently.