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Silicon nanoporous pillar array (Si-NPA) has been prepared by a hydrothermal etching technique. Using Si-NPA as substrate, a Cu/Si-NPA nanocomposite thin film has been obtained with immersion plating method. Morpho- logical and structural analysis indicates that Si-NPA is a typical structural composite system characterized by a triple hierarchical structure, i. e. the array of micron-sized silicon pillars, the nanopores densely distributed on the surface of the pillars, and the silicon nanocrystallites that constitute the pore walls. Cu/Si-NPA inherits the morphological character- istics of Si-NPA. The compactability of the deposited copper nanoparticles varies alternatively with the local geometrical features of Si-NPA and forms a quasi-periodical pattern. Such an experimental phenomenon is attributed to the veloc- ity dependence of the copper deposition upon the local geo- metrical features of Si-NPA. These results indicate that Si-NPA might be used as an ideal template for preparing specially patterned, structured or functionalized metal/ sili- con nanocomposite systems.
Silicon-nanoporous pillar array (Si-NPA) has been prepared by a hydrothermal etching technique. Using Si-NPA as substrate, a Cu / Si-NPA nanocomposite thin film has been obtained with immersion plating method. Si-NPA is a typical structural composite system characterized by a triple hierarchical structure, ie the array of micron-sized silicon pillars, the nanopores densely distributed on the surface of the pillars, and the silicon nanocrystallites that constitute the pore walls. Cu / Si -NPA inherits the morphological character- istics of Si-NPA. The compactability of the deposited copper nanoparticles varies alternatively with the local geometrical features of Si-NPA and forms a quasi-periodical pattern. Such an experimental phenomenon is attributed to the veloc- ity dependence of the copper deposition on the local geo- metrical features of Si-NPA. These results indicate that Si-NPA might be used as an ideal template for preparing specially patterned, structured or functionalized metal / sili- con nanocomposite systems.