为了探究不同干涉仪对中频误差的响应规律,获得相对真实的功率谱密度(PSD)分布,分别利用4D AccuFiz、ZYGO DynaFiz以及ZYGO GPI三台干涉仪检测周期性波纹和划痕样品,并对一维实测PSD曲线进行对比分析。结果表明,不同干涉仪对中高频信息的响应度不同;干涉仪分辨率越高,响应度越高。利用仪器传递函数(ITF)曲线对实测PSD分布进行了修正,获得了较为真实的PSD分布。在某些频率范围内,标定的ITF曲线和实际响应仍存在差异。 In order to explore the response law of different interferometers to the IF error and obtain the relatively true power spectral density (PSD) distribution, the periodic undulations and scratches were detected by 4D AccuFiz, ZYGO DynaFiz and ZYGO GPI respectively. Dimensional measured PSD curve for comparative analysis. The results show that the responsivity of different interferometer to medium and high frequency information is different; the higher the resolution of interferometer, the higher the responsivity. The distribution of measured PSD was corrected by the instrument transfer function (ITF) curve, and a more realistic PSD distribution was obtained. In some frequency ranges, there is a difference between the calibrated ITF curve and the actual response.