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光外差表面粗糙度在线干涉测量仪中,待测表面粗糙度的差异,使得从待测表面返回的测量信号在幅度上有很大的起伏,而使表面粗糙度测量结果的精度大大降低。本文着重讨论了测量信号的自动电压控制的原理及设计中的考虑,所制作的自动电压控制电路输入信号峰-峰值的动态范围1mV~5V,输出信号峰一峰值最大变化小于±10mV。结出了实验结果。
In the optical heterodyne surface roughness on-line interferometer, the difference of the surface roughness to be measured makes the measured signal returned from the surface to be measured fluctuate greatly in amplitude, which greatly reduces the accuracy of the surface roughness measurement result. This article focuses on the principle and design considerations of the automatic voltage control of the measurement signal. The automatic voltage control circuit has a peak-to-peak dynamic range of 1mV ~ 5V and a peak-to-peak variation of the output signal of less than ± 10mV. Results came out.