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为解决激光干涉测在米级的大位移和距离方面的不足,提出用两组阵列角锥棱镜组对光路进行折叠,并使两镜组产生相对往复移动,使参考光束光程变化达到测量光束光程的变化,从而能实现长距离测量,同时对系统的测量范围和测量精度进行分析,其测量范围取决于两镜组角锥棱镜的数量和相对位移,在宽带光源波长为0.1~0.4nm的系统进行模拟分析,系统测量精度取决于工作波长中较短的部分,对应一般的探测器,精度可达0.01mm。系统结构简单,为双光束干涉测量位移装置在小型化方面提供一种可行的解决方案。
In order to solve the shortcomings of the laser interferometry in the large displacement and distance of the rice level, it is proposed to use two sets of array pyramid prism groups to fold the light path and make the relative reciprocal movement of the two mirror groups, so that the reference beam path length changes to reach the measuring beam Light path changes, which can achieve long-distance measurements, while the system measurement range and measurement accuracy analysis, the measurement range depends on the number and relative displacement of the two groups of pyramids prism, the broadband light source wavelength of 0.1 ~ 0.4nm Of the system simulation analysis, the system measurement accuracy depends on the shorter part of the working wavelength, corresponding to the general detector, the accuracy of up to 0.01mm. The system structure is simple, providing a feasible solution for miniaturization of the displacement measuring device for double-beam interference measurement.