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本文进行了三种离子多元共渗工艺的对比试验研究,探讨了添加稀土、硼对氯化的影响。研究结果表明,对离子轰击化学热处理过程,稀土同样具有活化、催渗的作用。加入稀土提高了离子氮化层的硬度并增加渗层厚度。对渗层表面氮浓度分析表明,以加硼、稀土离子氮化的试样表面氮浓度最高,而以纯氨离子氮化最低。离子探针分析证实了稀土、硼的渗入,并在渗层中形成了浓度梯度,俄歇电子能对材料表面杂质元素如硫、磷的分析表明,稀土促进了试样表面硫、磷的富集,这一方面净化基体的晶界,另一方面聚集在表面的氧、硫、磷在零件承受磨擦负荷的情况下,有润滑、减摩的作用。
In this paper, comparative experiments on three kinds of ion multivariate permeation were carried out. The effects of adding rare earth and boron on chlorination were discussed. The results show that the ion bombardment chemical heat treatment process, rare earth also has the activation, reminding effect. The addition of rare earth increases the hardness of the ionic nitride layer and increases the thickness of the layer. The analysis of nitrogen concentration on the surface of the infiltration layer shows that the nitrogen concentration on the surface of the sample nitrided by boron and rare earth ions is the highest, while that on pure ammonia ion is the lowest. Ion probe analysis confirmed the infiltration of rare earth and boron, and formed a concentration gradient in the diffusion layer. Auger electron energy analysis of the surface impurity elements such as sulfur and phosphorus showed that rare earth promoted the enrichment of sulfur and phosphorus on the sample surface Set, on the one hand, the purification of the grain boundaries of the matrix, on the other hand gathered in the surface of oxygen, sulfur, phosphorus friction load in the case of parts, there is lubrication, anti-friction effect.