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针对轴对称壳形振动陀螺的工作机理与振动特性,提出了一种新颖的全对称U型梁MEMS环形波动陀螺,并分析了其工作原理、振动特性与敏感工作方式。在此基础上应用ANSYS有限元分析软件建立了该环形振动陀螺谐振结构的有限元模型,分别进行了模态分析、谐响应分析、瞬态冲击响应分析与静力分析。仿真分析结果显示该环形陀螺驱动与敏感模态固有频率的频差为33 Hz,工作模态的频率匹配性较好;工作模态与其他振动模态的最小频差为1 032 Hz,能够有效抵抗环境振动的干扰;谐振结构在10 000g的瞬态冲击作用下最大应力为39.5 MPa,可以正常稳定工作。
Aiming at the working mechanism and vibration characteristics of axisymmetric shell vibrating gyroscope, a novel symmetrical U-beam MEMS ring undulating gyroscope is proposed and its working principle, vibration characteristics and sensitive working methods are analyzed. On this basis, the finite element model of the resonant structure of the ring-shaped vibrating gyroscope is established by using ANSYS finite element analysis software. The modal analysis, harmonic response analysis, transient impulse response analysis and static analysis are respectively carried out. The simulation results show that the frequency difference between the ring-shaped gyroscope and the sensitive modes is 33 Hz, and the frequency matching of the working modes is better. The minimum frequency difference between the working modes and other vibration modes is 1 032 Hz, which can be effective Resist the disturbance of environmental vibration; The maximum stress of the resonant structure under the transient impact of 10 000 g is 39.5 MPa, which can work normally and stably.