Blue emission from hydrogen-containing a-Si：H／SiO2 multilayers and the investigation of its mechanis

来源 :中国科学通报：英文版 | 被引量 : 0次 | 上传用户：dingshilin

【摘要】

：

A series of hydrogen-containing a-Si:H/SiO2 multilayers with different a-Si:H sublayer thickness were fabricated by layer-by-layer deposition and in situ plasma

【作者】

：

ZHUDa MAZhongyuan MEIJiaxin HA

【机构】

：

StateKeyLaboratoryofSolidMicrostructureandDepartmentofPhysics

【出处】

：

中国科学通报：英文版

【发表日期】

：

2004年18期

【关键词】

：

蓝色光发射硅纳米晶体氧化硅 a-Si:H/SiO2多层等离子体氧化蓝色偏移量子论 a-Si:H/SiO2 mutilayers plasma oxi

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A series of hydrogen-containing a-Si:H/SiO2 multilayers with different a-Si:H sublayer thickness were fabricated by layer-by-layer deposition and in situ plasma oxidation in a plasma-enhanced chemical vapor deposition system (PECVD). Optical induced blue

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Blue emission from hydrogen-containing a-Si：H／SiO2 multilayers and the investigation of its mechanis

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