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介绍了一种刻划精度达±0.06″,采用圆光栅作角分度基准器,空气静压双半球轴系作主轴,由电机直接驱动,用脉冲氙灯作光源,以聚乙烯醇负性光刻胶作感光胶的新型的连续动态光刻光电式动态光栅精密圆刻机的设计和它的研制要点及有关技术。
A scoring accuracy of ± 0.06 "was introduced. A circular grating was used as the angular indexing unit. The hydrostatic double hemispherical shaft was used as the main shaft. The motor was driven directly by the motor. A pulsed xenon lamp was used as the light source. The design of the new continuous dynamic lithography electro-optical dynamic grating precision circular engraving machine with the photoresist as the photosensitive adhesive and its development points and related technologies.