采用有效质量近似,将耦合在一起的6×6价带本征方程分开来考虑,取激子试探波函数为z方向和x-y平面分离的形式,用变分法计算了ZnO薄膜重空穴带激子基态能、第一激发态能、束缚能和激子的半径随薄膜厚度的变化关系,并讨论了电子波函数的量子隧穿效应对厚度d<2.0nm薄膜的能量修正. Taking the effective mass approximation, the coupled 6 × 6 valence band intrinsic equations are considered separately. Taking the exciton probe function as a form of z-direction and xy-plane separation, The exciton ground state energy, the first excited state energy, the binding energy and the exciton radius change with the thickness of the film, and the quantum tunneling effect of the electron wave function is discussed for the energy correction of the thin film with thickness d <2.0 nm.