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本文介绍了一种可以形成新型光纤传感器的微型硅谐振器，其基本原理是微型硅谐振器在调制光的光热作用下产生谐振，被测物理参数使谐振频率发生改变．文中给出了用单晶硅制作桥型微谐振器的方法，研究了微型谐振器在光激励下产生振动的机理．
In this paper, we introduce a micro-silicon resonator that can form a new type of optical fiber sensor. The basic principle is that the micro-silicon resonator resonates under the light and heat of modulated light, and the measured physical parameters change the resonant frequency. In this paper, a method of fabricating bridge microresonator with monocrystalline silicon is given, and the mechanism of vibration generated by the microresonator under light excitation is studied.