本专利提供一种以193 nm或248nm波长产生高度单色紫外激光辐射的固态系统,它由以下几部分组成:(A)一个Nd:YAG激光器,该激光器用于产生由 1064 nm红外激光辐射窄线宽脉冲构成的主激光束,其脉冲的持续时间不到 30 ns,重复率每秒至少 500脉冲,线宽小于 0.002 us;(B)一个以上 This patent provides a solid state system for generating highly monochromatic UV laser radiation at a wavelength of 193 nm or 248 nm which consists of: (A) a Nd: YAG laser for producing a laser beam that is narrowed by 1064 nm infrared laser radiation The main laser beam consisting of linewidth pulses has a pulse duration of less than 30 ns and a repetition rate of at least 500 pulses per second with a linewidth of less than 0.002 us; (B) one or more