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纳米测量技术和测量装置的不断创新与进步将带动纳米技术的快速发展.微观操作的重要的基础之一就是微纳尺度位移的精确的测量.本文针对在电子扫描显微镜真空腔中工作的微纳操作机器人的末端运动测量问题,采用时间–数字转换(time-digital covertor,TDC)方法,测量通过电阻应变片给标准电容充电放电的时间来计算其应变量,进而计算其位移.进一步分析了本方法的误差传递和系统耗散功率,并与传统的惠斯通电桥方法进行了比较,可以得出本方法在误差优化的同时,耗散功率有极大的降低,对于真空中散热困难的操作条件下,有较大的优势.对传感的漂移、精度、分辨率和线性等问题进行测试,并对系统进行闭环控制和重复微观单元测试等应用演示,证明方法的有效性.
The continuous innovation and advancement of nanometer measurement and measurement devices will lead to the rapid development of nanotechnology.One of the important foundations of microscopic operation is the accurate measurement of micro and nano-scale displacement.In this paper, To measure the end-of-body motion of robots, the time-to-digital conversion (TDC) method was used to measure the amount of strain applied to a standard capacitor through a strain gage and to calculate its displacement. The method of error transfer and system power dissipation are compared with the traditional Wheatstone bridge method. It can be concluded that the proposed method has a great reduction in power dissipation while the error is optimized. For the difficult operation in vacuum , It has a great advantage to test the drift, accuracy, resolution and linearity of the sensor, and demonstrate the effectiveness of the method by applying closed-loop control and repeated microscopic unit testing to the system.