真空泵的发展从十七、十八世纪迄今已经历了三个多世纪漫长的历史过程。近一个世纪以来,真空泵的研究设计、抽速、机械性能方面的研究工作突飞猛进,有了很大的起色。特别是白炽灯、真空管、真空蒸馏、真空仪器(质谱仪、电子显微镜、粒子加速器和阴极射线管)、核物理、真空冶金、空间模拟、薄膜沉积、表面分析等方面的真空应用促进了真空获得 The development of vacuum pump from the seventeenth, eighteenth Century so far has gone through the long history of more than three centuries. For nearly a century, research and design of vacuum pumps, pumping speed, mechanical properties of the research work by leaps and bounds, with great improvement. Vacuum applications such as incandescent lamps, vacuum tubes, vacuum distillation, vacuum instruments (mass spectrometers, electron microscopes, particle accelerators and cathode ray tubes), nuclear physics, vacuum metallurgy, space simulation, thin film deposition, surface analysis,