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微波模块作为雷达的核心模块,其内部使用了大量的半导体裸芯片,模块的密封是基本要求。激光密封焊接作为一种新兴的密封技术,成为保护微波混合集成电路的有效手段。在激光密封过程中,选用的铝合金材质、结构、表面处理、YAG激光设备的工作参数如脉冲波形、频率、峰值功率、离焦量、焊接速度对铝合金激光密封质量有着十分重要的影响。通过对以上因素的控制,模块密封性可以达到国家军标密封性的最高要求,即壳体漏率小于1×10~(-9)Pa·m~3/s。
As the core module of the radar, the microwave module uses a large number of semiconductor bare chips inside, and the sealing of the module is the basic requirement. As a new sealing technology, laser sealing welding has become an effective way to protect microwave hybrid integrated circuits. In the process of laser sealing, the selected aluminum alloy material, structure, surface treatment, YAG laser equipment operating parameters such as pulse waveform, frequency, peak power, defocus amount, welding speed aluminum laser sealing quality has a very important impact. Through the control of the above factors, the tightness of the module can reach the highest requirement of the national military standard of tightness, that is, the leakage rate of the shell is less than 1 × 10 -9 Pa · m -3 / s.