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针对CVD金刚石膜生长手动控制的种种不便,在生长系统中引入了计算机控制,实现了用计算机控制生长金刚石膜的衬底温度。详细介绍了计算机控制系统的设计和实现方法。实际运行结果表明,该系统稳定性好、可靠性高,实现了金刚石膜稳定生长。
For the inconvenience of the manual control of CVD diamond film growth, computer control was introduced into the growth system, which realizes the substrate temperature of the diamond film grown by computer. Described in detail the design and implementation of computer control system. The actual operation results show that the system has good stability and high reliability, and realizes the stable growth of diamond film.