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本文通过实验,直接利用扫描电镜已有的吸收电流放大器获得EBIC讯号,对集成电路的P—N结完整性及P—N隔离区质量进行了观察,并对实验原理进行了浅显的分析。
In this paper, the EBIC signal is obtained by using the absorption current amplifier of the SEM directly through experiments. The integrity of the P-N junction and the quality of the P-N isolation area are observed, and the experimental principle is briefly analyzed.