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为了有效改善基于无机材料的可变光衰减器(VOA)功耗大以及成本高的问题,设计并研制了一种基于有机聚合物材料的低功耗马赫-曾德尔干涉仪(MZI)型VOA器件。为保证器件的单模传输,优化了波导的结构和横截面尺寸,同时对加热电极的热场分布进行了模拟分析。最后,采用紫外光刻和湿法刻蚀等半导体工艺,制备出功耗较低、响应速度较快的VOA器件。在650nm工作波长下,测得器件的衰减为14.6dB,驱动功率仅为12.3mW,器件的上升时间为240μs,下降时间为200μs。实验结果表明,采用聚合物材料,并通过对器件的结构参数进行优化,可研制出工作在可见光波段的低功耗VOA器件。
In order to effectively improve the power consumption and high cost of variable optical attenuators (VOA) based on inorganic materials, a low power Mach-Zehnder Interferometer (MZI) based VOA based on organic polymer materials has been designed and developed Device. In order to ensure single-mode transmission of the device, the structure and cross-sectional size of the waveguide are optimized, and the thermal field distribution of the heating electrode is simulated. Finally, the semiconductor devices such as UV lithography and wet etching are used to fabricate VOA devices with low power consumption and high response speed. At 650nm operating wavelength, the measured attenuation of the device is 14.6dB, the driving power is only 12.3mW, the rising time of the device is 240μs and the falling time is 200μs. The experimental results show that the use of polymer materials, and through the structural parameters of the device optimized to work in the visible band of low-power VOA devices.